Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table

نویسندگان

  • Yanling Tian
  • Zhiyong Guo
  • Fujun Wang
  • Junlan Li
  • Dawei Zhang
چکیده

This paper presents the mechanical design and experimental characterization of a 2-DOF serial flexurebased micropositioning table. The cascade mechanical structure is proposed to implement planar motions of the moving platform. In order to increase the stroke of the moving platform, a lever mechanism is designed to amplify the displacement of the piezoelectric actuator. The finite element method is utilized to analyze the mechanical and thermal characteristics of the proposed 2-DOF micropositioning table. The WEDM (Wire Electro-Discharge Machining) technique is used to manufacture the prototype of the micropositioning table. A number of experimental tests have been conducted to investigate the characteristics of the developed system. Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table

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عنوان ژورنال:
  • IJIMR

دوره 3  شماره 

صفحات  -

تاریخ انتشار 2013